Properties of typical MEMS materials have been widely investigated.Mechanical properties of MEMS structures depend not only on the bulk materialproperties, but also structural factors. A measurement system has been made tomeasure force/deflection on microstructures to examine some of the structuralproperties. This is a stylus setup integrated with a load cell and a linearactuator. First, the requirements for the measurement system were established.Then the system was built up and characterized. We have successfully mademeasurements on a typical micromechanical structure, a cantilever accelerometerdesign. The stylus placement accuracy, the spring constant along the proofmass, analysis of the force/deflection curve shape and destructive tests on thecantilever have been investigated in our experiment and will be presented inthis paper.
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